MKS MINI-CONVECTRON 275 SERIES INSTRUCTION MANUAL Pdf Download (2024)

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Vacuum gauge module with nonlinear analog outputs and process control relays

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Series 275

Mini-Convectron

with Nonlinear Analog Outputs and Process

Control Relays

Instruction Manual

Instruction manual part number 275513

Revision C - November 2019

Vacuum Gauge Module

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Summary of Contents for MKS Mini-Convectron 275 Series

Page 1 Series 275 ® Mini-Convectron Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays Instruction Manual Instruction manual part number 275513 Revision C - November 2019...
Page 3 Instruction Manual © 2019 MKS Instruments, Inc. All rights reserved. Granville-Phillips ® and Convectron ® are registered trademarks, and mksinst is a trademark of MKS Instruments, Inc. All other trademarks and registered trademarks are the properties of their respective owners.
Page 4 ® Mini-Convectron Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays Catalog numbers for Series 275 Mini-Convectron Modules This manual is for use only with the following catalog numbers: Mini-Convectron Module with one (1) setpoint relay..275400 - 1 - X X - X Mini-Convectron Module with two (2) setpoint relays .
Page 5 Table of Contents Chapter 1 Safety ..........Chapter 2 Chapter 2 Installation .
Page 6 Table of Contents Mini-Convectron Module Instruction Manual - 275513...
Page 7 These instructions do not and cannot provide for every contingency that may arise in connection with the installation, operation, or maintenance of this product. If you require further assistance, contact MKS at the address on the title page of this instruction manual.
Page 8 Failure to comply with these precautions or with specific warnings elsewhere in this manual violates safety standards of design, manufacture, and intended use of the instrument. MKS Instruments, Inc. disclaims all liability for the customer's failure to comply with these requirements.
Page 9 Safety 1.2 Grounding Requirements See Grounding, Section 2.3.4 in the Installation chapter for more detailed requirements regarding gauge and system grounding. Proper Grounding All components of a vacuum system used with this or any similar high voltage product must be maintained at Earth ground for safe operation.
Page 10 Chapter 1 1.4 Over-Pressure Conditions Over-Pressure Conditions Install suitable devices that will limit the pressure to the level the vacuum system can safely withstand. In addition, install suitable pressure relief valves or rupture disks that will release pressure at a level considerably below the pressure that the system can safely withstand.
Page 11 MKS literature including, but not limited to, manuals, instructions, bulletins, communications, and recommendations. For product safety related matters, contact the MKS Customer Service Department. See Section 1.8 for detailed information regarding how to contact MKS Customer Service Representatives.
Page 12 Because of the danger of introducing additional hazards, do not install substitute parts or perform any unauthorized modification to the product. Return the product to a service facility designated by MKS for service and repair to ensure that safety features are maintained. Do not use this product if it has unauthorized modifications.
Page 13 Safety 1.8 Service Guidelines Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA.
Page 14 Chapter 1 1.10 FCC Verification This equipment was tested and found to comply with the limits for a Class A digital device, pursuant to Part 15 of the FCC Rules. These limits are designed to provide reasonable protection against harmful interference when the equipment is operated in a commercial environment.
Page 15 Chapter 2 Chapter 2 Installation 2.1 Module Components The Mini-Convectron module contains a Convectron convection-enhanced Pirani heat-loss gauge. Explosive Environment Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury.
Page 16 Before you install the module, install appropriate pressure relief devices in the vacuum system. MKS does not supply pressure relief valves or rupture disks. Suppliers of pressure relief valves and pressure relief disks can be located via an on-line search.
Page 17 Chapter 2 Installation Length of tubing depends on the application. Longer tubing will affect vacuum pressure limit and response time. • Do not locate the module near the pump, where gauge pressure might be lower than normal vacuum chamber pressure. •...
Page 18 Chapter 2 Figure 2-4 Module Orientation Mount the Module Axis Horizontally to Ensure Accurate Measurement Above 1 Torr Vacuum chamber Vacuum chamber Recommended Not recommended 2.3.2 Attach the module to the vacuum chamber Attach the module vacuum chamber fitting to its mate on the vacuum chamber. Over-Pressure Conditions Twisting the module to tighten the fitting to the vacuum chamber can damage the module’s internal connections.
Page 19 The cable is user-supplied. MKS does not supply the cable. Install externally shielded cable and connect the shield at both ends. At the module end of the cable, connect the shield to the outer shell of the subminiature D connector.
Page 20 Chapter 2 2.3.3.2 Wiring Terminals Figure 2-5 #275400-1 Module with 9-Pin Connector, one Setpoint Relay, no Digital Display Figure 2-6 #275400-2 Module with15-Pin Connector, two Setpoint Relays, no Digital Display Figure 2-7 #275600-0 Module with15-Pin Connector, no Setpoint Relay, 3-Digit Display Figure 2-8 #275600-2 Module with 15-Pin Connector, two Setpoint Relays, 3-Digit Display Mini-Convectron Module Instruction Manual - 275513...
Page 21 Chapter 2 Installation 2.3.4 Grounding Explosive Environment Improper grounding could cause product failure, property damage, or serious personal injury. To reduce the risk of product failure, property damage, or serious personal injury, follow ground network requirements for the facility. Maintain all exposed conductors at Earth ground. Ground the module housing to the vacuum chamber.
Page 22 Chapter 2 2.3.5 Configure the setpoint relays for the application Explosive Environment Failure to use accurate pressure conversion data for N or air to other gases can cause an explosion due to over-pressurization. If the module will measure any gas other than N or air, before connecting relays to system control devices, adjust setpoints for the process gas that will be used.
Page 23 Chapter 3 Operation 3.1 Preparing to Operate the Module Explosive Environment Using the module to measure the pressure of flammable or explosive gases can cause a fire or explosion resulting in severe property damage or personal injury. Do not use the module to measure the pressure of flammable or explosive gases.
Page 24 Chapter 3 Figure 3-1 Mini-Convectron Module with two Setpoint Relays and 3-Digit Display RELAY ON SP1 and SP2 LEDs S.P. ADJUST SET switch S.P. ADJUST UP and DOWN switches ADJUST ATM potentiometer ADJUST VAC potentiometer Pressure value display Pressure Unit LEDs (Torr or Pa) Table 3-1 Front Panel Features of Mini-Convectron Module with 3-Digit Display Feature...
Page 25 Operation Figure 3-2 Mini-Convectron Module with one Setpoint Relay, no Display ADJUST SET POINT potentiometer ADJUST ATMOSPHERE MONITOR COMMON test point potentiometer MONITOR ANALOG test point ADJUST MONITOR VACUUM SET POINT potentiometer test point P>100MT LED RELAY ON LED Table 3-2 Front Panel Features of Mini-Convectron Module with one Setpoint Relay, no Display Feature Description ADJUST ATMOSPHERE...
Page 26 Chapter 3 Figure 3-3 Mini-Convectron Module with two Setpoint Relays, no Display ADJUST SET PT1 and SET PT2 potentiometers ADJUST MONITOR COMMON test point ATMOSPHERE potentiometer MONITOR ANALOG ADJUST test point VACUUM potentiometer P>100MT LED MONITOR SET PT1 and SET PT2 test points Table 3-3 Front Panel Features of Mini-Convectron Module with two Setpoint Relays, no Display Feature...
Page 27 See Section 3.3.1. For application assistance, contact an MKS application engineer at +1-833-986-1686. Once the module is operating, you may use the module front panel to perform the tasks listed in Table 3-5.
Page 28 Chapter 3 3.2 Nonlinear Analog Output The module contains a convection-enhanced Pirani thermal conductivity gauge. The gauge measures the heat loss from a heated sensing wire that is maintained at a constant temperature. The analog output produces a nonlinear voltage that corresponds to measured pressure. Output voltage is measured across pins 5 and 8 if the module has one setpoint relay or across pins 5 and 6 if the module has zero or two setpoint relays.
Page 29 Operation Table 3-6 Equations for Calculating N or Air Pressure Versus Analog Output Voltage Segment Output Voltage Equation where y = Pressure and x = Voltage Coefficients 0.375 to 2.842 V –0.02585 Torr 0.03767 × 133.3 0.04563 0.1151 ) 1.333 ×...
Page 30 Chapter 3 Figure 3-4 Analog Output Voltage vs. Indicated N or Air Pressure, 1 mTorr to 100 mTorr Mini-Convectron Module Instruction Manual - 275513...
Page 31 Operation Figure 3-5 Analog Output Voltage vs. Indicated N or Air Pressure, 0.1 Torr to 1000 Torr Mini-Convectron Module Instruction Manual - 275513...
Page 32 Chapter 3 Table 3-7 Voltages (Vdc) for Commonly used Gases, 0.1 mTorr to 1000 Torr Mini-Convectron Module Instruction Manual - 275513...
Page 33 Operation –4 –1 Figure 3-6 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 10 Torr Indicated pressure in Torr (N equivalent) To convert Torr to pascal, multiply by 133.3 To convert Torr to mbar, multiply by 1.333 Mini-Convectron Module Instruction Manual - 275513...
Page 34 Chapter 3 –1 Figure 3-7 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr Indicated pressure in Torr (N equivalent) To convert Torr to pascal, multiply by 133.3 To convert Torr to mbar, multiply by 1.333 Mini-Convectron Module Instruction Manual - 275513...
Page 35 Operation –1 Figure 3-8 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 1000 Torr Indicated pressure in Torr (N equivalent) To convert Torr to pascal, multiply by 133.3 To convert Torr to mbar, multiply by 1.333 Mini-Convectron Module Instruction Manual - 275513...
Page 36 Chapter 3 –4 Figure 3-9 True Pressure versus Indicated Pressure for Commonly used Gases, 10 to 0.1 mbar Mini-Convectron Module Instruction Manual - 275513...
Page 37 Operation Figure 3-10 True Pressure versus Indicated Pressure for Commonly used Gases, 0.1 to 1000 mbar Mini-Convectron Module Instruction Manual - 275513...
Page 38 Chapter 3 Figure 3-11 True Pressure versus Indicated Pressure for Commonly used Gases, 0.1 to 1000 mbar Mini-Convectron Module Instruction Manual - 275513...
Page 39 Operation 3.3 Setpoint Relays The module includes one single-pole, double throw (SPDT) relay or two such relays. Each relay has a programmable setpoint. The setpoint is a voltage level that corresponds to a specified pressure at which the relay activates and deactivates. When the module is shipped from the factory, relays are set to activate below 0.0 Torr.
Page 40 Chapter 3 3.3.1 Preparing to Adjust Setpoint Relays If the module will measure the pressure of any process gas other than N or air, you must adjust setpoint relays for the process gas that will be used. The true pressure of a gas other than N or air may be substantially different from the pressure that the output indicates.
Page 41 Operation desired setpoint voltage at which the relay will activate with decreasing pressure. 3.3.2.2 If the module without a display has two setpoint relays: 1. Use a high-precision, high-input impedance DVM to measure the voltage across the MONITOR SET PT1 or MONITOR SET PT2 and MONITOR COMMON test points on the module front panel. 2.
Page 42 Chapter 3 –3 –2 Figure 3-13 Example Test Point Voltage: 0.64 V equals 40 mTorr (5.3 x 10 kPa, 5.3 x 10 mbar) of N or Air Mini-Convectron Module Instruction Manual - 275513...
Page 43 Operation Figure 3-14 Example Test Point Voltage: 4.8 V equals 40 Torr (5.33 kPa, 53.3 mbar) of N or Air Mini-Convectron Module Instruction Manual - 275513...
Page 44 Chapter 3 3.4 Reading Relay Status If the module without a display has one setpoint relay, or if the module has the optional display, use the setpoint LEDs to read activation/deactivation status of relays. 3.4.1 If the module without a display has one setpoint relay: The RELAY ON LED is solid green when the setpoint relay is activated.
Page 45 Operation Table 3-8 Typical Atmospheric Pressures at Altitude/Pressure/Voltage Relationships Altitude Above Sea Level Pressure of N or Air Analog Output Feet Meters Torr mbar Voltage (Vdc) 1013 5.534 1000 5.513 2000 5.493 3000 5.473 4000 1219 5.454 5000 1524 5.435 6000 1829 5.417...
Page 46 Chapter 3 3.7 Modules Operating at Low Pressure During a fast pumpdown from atmospheric pressure, thermal effects temporarily prevent the module from measuring pressure accurately below 1 x 10 Torr (1.3 x 10 kPa, 1.3 x 10 mbar). After –3 –4 –3 approximately 15 minutes, pressure indications the 1 x 10...
Page 47 Chapter 4 Maintenance 4.1 Customer Service Some minor problems are readily corrected on site. If the product requires service, contact the MKS Technical Support Department at +1-833-986-1686. If the product must be returned to the factory for service, request a Return Material Authorization (RMA) from MKS. Do not return products without first obtaining an RMA.
Page 48 Substitution or modifying parts can result in serious product damage or personal injury due to electrical shock or fire. Install only those replacement parts that are specified by MKS. Do not install substitute parts or perform any unauthorized modification to the module.
Page 49 Maintenance 4.2.2 Symptoms, Causes, and Solutions Table 4-1 lists failure symptoms, causes, and solutions. Table 4-1 Failure Symptoms, Causes, and Solutions Symptom Possible Causes Solution Output voltage = 0 V 11.5 to 26.5 V power supply cable Repair or replace power supply is improperly connected or faulty.
Page 50 Chapter 4 4.3 Convectron Gauge Test Over-Pressure Conditions Performing a Convectron gauge test with instruments that apply more than 0.1 V with the gauge at vacuum chamber pressure can result in property damage. Do not perform a Convectron gauge test with an instrument that applies more than 0.1 V of electromotive force.
Page 51 Maintenance 4.4 Convectron Gauge Removal and Replacement Safety Precautions Removing or replacing the Convectron gauge in a high-voltage environment can cause an electrical discharge through a gas or plasma, resulting in serious property damage or personal injury due to electrical shock. Vent the vacuum chamber to atmospheric pressure and shut off power to the module before you remove or replace the Convectron gauge.
Page 52 Chapter 4 Mini-Convectron Module Instruction Manual - 275513...
Page 53 Appendix A Specifications Pressure Measurement Measurement Range for Air or N Torr 1 x 10 –4 to 1000 mbar 1 x 10 –4 to 1333 –2 Pascal 1 x 10 to 1.33 x 10 Resolution Torr 1 x 10 –4 mbar 1 x 10 –4...
Page 54 Relays and Outputs Setpoint Relays Relay type Single-pole, double-throw (SPDT), Form A Contact rating 1 A at 30 Vdc resistive, 30 VAC non-inductive Range Torr 1 x 10 –3 to 1000 –3 mbar 1 x 10 to 1333 –1 Pascal 1 x 10 to 1.33 x 10 Hysteresis...
Page 55 Physical Characteristics Mounting Position Horizontal axis (see page 18) Case Material Powder-coated extruded aluminum Weight 340 g (12 oz.) with 1/8 NPT fitting Dimensions Dimensions are in cm (in.) Vacuum Connections Dim. H 1/8 NPT pipe thread, ½-inch inside diameter 1/4-inch 4 VCR ®...
Page 56 Mini-Convectron Module Instruction Manual - 275513...
Page 57 Appendix B Theory of Operation The module measures gas pressures from 1 x 10 Torr to 1000 Torr. Vacuum chamber pressure is –4 measured by a Convectron convection-enhanced Pirani heat-loss gauge. The Convectron gauge operates like a standard Pirani gauge, which employs the principle of a Wheatstone bridge to convert pressure to voltage, but uses convection cooling to enable accurate pressure measurement, when properly calibrated, from 10 to 1000 Torr.
Page 58 Mini-Convectron Module Instruction Manual - 275513...
Page 59 Index module with two relays, no display 24, 26 module without display 15 Analog output output voltage versus N or air pressure voltage versus commonly used gas pressure 28 0.1 Torr to 1000 Torr 31 voltage versus N or air pressure 29–31 1 mTorr to 100 mTorr 30 voltage versus other gas pressure 28 setpoint relay behavior 39...
Page 60 Index troubleshooting precautions 48 Relief devices 16 Module analog output 28 analog output from 28 Safety analog output specifications 54 Cautions & Warnings 7 attaching to vacuum chamber 18 instructions 7 components Service 12 with one relay, no display 15, 25 Setpoint relays with two relays, no display 15, 26 behavior 39...
Page 61 Index ground connection to vacuum chamber 21 grounding 21 I/O connector module with one relay 20 module with two relays 20 specifications 53 installation 19 power supply 20 terminals 20 Mini-Convectron Module Instruction Manual - 275513...
Page 62 Index Mini-Convectron Module Instruction Manual - 275513...
Page 64 ® Mini-Convectron Vacuum Gauge Module with Nonlinear Analog Outputs and Process Control Relays Customer Service / Technical Support: MKS Global Headquarters 2 Tech Drive, Suite 201 Andover MA, 01810 USA Phone: +1-833-986-1686 Email: insidesales@mksinst.com Visit our website at www.mksinst.com Instruction Manual...